Texture of Thin Films of Aluminum Nitride Produced by Magnetron Sputtering
Published on: 29th January, 2025
The results of the study of the texture of thin films of aluminum nitride obtained by magnetron sputtering are presented. The dependence of the sizes and degree of preferential orientation of crystallites on the conditions of formation of thin films (pressure, discharge power, composition of the plasma-forming gas) is investigated.
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